Description
LAM 9400 PTX 3 Chamber Parts ToolConfiguration
Total 3 chambers 06MF – all intact, VCE board for A and B not available 06PM1 – chamber intact, no generator, no match, dip board and auto-tune board no available 06PM3 – chamber intact, no generator, no match, dip board and auto-tune board no available 06PM4 – chamber intact, no generator, no match, dip board and auto-tune board no available Tranfers robot is faulty – fuse blown Software PC – formatted- need to install LAM software All chamber gas box are intactOEM Model Description
TCP 9400 is part of Lam’s TCP product line of high-density, low-pressure systems that were introduced in late 1992. It incorporates the Company’s patented Transformer Coupled Plasma source technology for etching 0.35 micron and smaller geometries. The TCP 9400 series is designed for polysilicon and polycide etch applications and is used to produce a broad range of advanced logic and memory devices. The system operates at lower pressures for improved pattern transfer control and higher plasma density for higher etch rates, with independent power control to the lower electrode, which improves etch results across a wider process window. The TCP system is designed to offer customers a reliable, lower cost of ownership solution to their advanced needs.Documents
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Verified
CATEGORY
Dry / Plasma Etch
Last Verified: 9 days ago
Key Item Details
Condition:
Parts Tool
Operational Status:
Unknown
Product ID:
153995
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH CORPORATION
TCP 9400
CATEGORY
Dry / Plasma Etch
Last Verified: 9 days ago
Key Item Details
Condition:
Parts Tool
Operational Status:
Unknown
Product ID:
153995
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
LAM 9400 PTX 3 Chamber Parts ToolConfiguration
Total 3 chambers 06MF – all intact, VCE board for A and B not available 06PM1 – chamber intact, no generator, no match, dip board and auto-tune board no available 06PM3 – chamber intact, no generator, no match, dip board and auto-tune board no available 06PM4 – chamber intact, no generator, no match, dip board and auto-tune board no available Tranfers robot is faulty – fuse blown Software PC – formatted- need to install LAM software All chamber gas box are intactOEM Model Description
TCP 9400 is part of Lam’s TCP product line of high-density, low-pressure systems that were introduced in late 1992. It incorporates the Company’s patented Transformer Coupled Plasma source technology for etching 0.35 micron and smaller geometries. The TCP 9400 series is designed for polysilicon and polycide etch applications and is used to produce a broad range of advanced logic and memory devices. The system operates at lower pressures for improved pattern transfer control and higher plasma density for higher etch rates, with independent power control to the lower electrode, which improves etch results across a wider process window. The TCP system is designed to offer customers a reliable, lower cost of ownership solution to their advanced needs.Documents
No documents