TCP 9400
Category
Dry / Plasma EtchOverview
TCP 9400 is part of Lam’s TCP product line of high-density, low-pressure systems that were introduced in late 1992. It incorporates the Company’s patented Transformer Coupled Plasma source technology for etching 0.35 micron and smaller geometries. The TCP 9400 series is designed for polysilicon and polycide etch applications and is used to produce a broad range of advanced logic and memory devices. The system operates at lower pressures for improved pattern transfer control and higher plasma density for higher etch rates, with independent power control to the lower electrode, which improves etch results across a wider process window. The TCP system is designed to offer customers a reliable, lower cost of ownership solution to their advanced needs.
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LAM RESEARCH CORPORATION
TCP 9400
Dry / Plasma EtchVintage: Condition: UsedLast VerifiedOver 30 days agoLAM RESEARCH CORPORATION
TCP 9400
Dry / Plasma EtchVintage: Condition: UsedLast VerifiedOver 60 days agoLAM RESEARCH CORPORATION
TCP 9400
Dry / Plasma EtchVintage: Condition: UsedLast VerifiedOver 60 days agoLAM RESEARCH CORPORATION
TCP 9400
Dry / Plasma EtchVintage: Condition: RefurbishedLast VerifiedOver 60 days ago