Description
LAM Rainbow 4528XL - 200mm Plasma EtchConfiguration
Former process: oxidepets Dimensions & weight estimates: Mainframe dim (cm): 111.8 x 137.2 x 167.5 Mainframe weight (kg): 788 Bypack1 dim (cm): 55.9 x 81.3 x 110.5 Bypack1 weight (kg): 135 Bypack2 dim (cm): 55.9 x 22.9 x 76.2 Bypack2 weight (kg): 120 Bypack3 dim (cm): 47.5 x 93 x 126 Bypack3 weight (kg): 226.8OEM Model Description
The Rainbow 4520XL is part of Lam Research’s Rainbow series of etch systems. This series addresses processes for wafers up to 200mm and feature sizes as small as 0.35 micron. The Rainbow product line includes the 4400, 4500, 4600, and 4700 series for etching polysilicon, oxide, aluminum, and tungsten films. These systems offer improved etch capability, reliability, and performance through unique features such as a patented wafer handling system and a proprietary source for generating stable plasma.Documents
LAM RESEARCH CORPORATION
RAINBOW 4520XL
Verified
CATEGORY
Dry / Plasma Etch
Last Verified: Today
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
117183
Wafer Sizes:
8"/200mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
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Money Back Guarantee
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Refurbishment Services
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LAM RESEARCH CORPORATION
RAINBOW 4520XL
CATEGORY
Dry / Plasma Etch
Last Verified: Today
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
117183
Wafer Sizes:
8"/200mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available