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LAM RESEARCH CORPORATION ALLIANCE 6 (A6)

Description

Alliance (A6) TCP 9400DFM

Configuration

Transport Module / TCP9400DFM-P Modules for Tungsten Silicide Etch Software: A4.0-37VM PM2 - TCP9400DFM-P - Wsix Etch PM3 - TCP9400DFM-P - Wsix Etch PM4 - TCP9400DFM-P - Wsix Etch ESC - Anodized Aluminum Interferometer EP - PM2, PM3 & PM4 Enhanced Universal Gas box - 12 Stick PM2 Gas box : (10) - Brooks GF125 PM3 Gas box: (8) - Unit 1661 Multiflow (1) - Brooks GF100 (1) - Horiba Z300 PM4 Gas Box: (9) - Unit 1661 Multiflow (1) - Horiba Z300 Brooks Automation Mag 7 Dry Pumps: Busch DS80 Cobra (3) Busch BB100 (2) Chillers: TCU - Edwards 40/80 Plus (3) RPM - Voltage SAG Enhanced

OEM Model Description

None Provided

Documents

No documents

LAM RESEARCH CORPORATION

ALLIANCE 6 (A6)

verified-listing-icon

Verified

CATEGORY

Dry / Plasma Etch

Last Verified: Over 60 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

127102

Wafer Sizes:

8"/200mm

Vintage:

2007

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

127102

Wafer Sizes:

8"/200mm

Vintage:

2007

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

Description

Alliance (A6) TCP 9400DFM

Configuration

Transport Module / TCP9400DFM-P Modules for Tungsten Silicide Etch Software: A4.0-37VM PM2 - TCP9400DFM-P - Wsix Etch PM3 - TCP9400DFM-P - Wsix Etch PM4 - TCP9400DFM-P - Wsix Etch ESC - Anodized Aluminum Interferometer EP - PM2, PM3 & PM4 Enhanced Universal Gas box - 12 Stick PM2 Gas box : (10) - Brooks GF125 PM3 Gas box: (8) - Unit 1661 Multiflow (1) - Brooks GF100 (1) - Horiba Z300 PM4 Gas Box: (9) - Unit 1661 Multiflow (1) - Horiba Z300 Brooks Automation Mag 7 Dry Pumps: Busch DS80 Cobra (3) Busch BB100 (2) Chillers: TCU - Edwards 40/80 Plus (3) RPM - Voltage SAG Enhanced

OEM Model Description

None Provided

Documents

No documents

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