Skip to main content
We value your privacy

We and our selected partners use cookies to enhance your browsing experience, serve personalized content, and analyze our traffic. By clicking "Accept All", you consent to our use of cookies. Read More

Moov logo

Moov Icon
LAM RESEARCH CORPORATION 2300 VERSYS KIYO
  • LAM RESEARCH CORPORATION 2300 VERSYS KIYO
  • LAM RESEARCH CORPORATION 2300 VERSYS KIYO
  • LAM RESEARCH CORPORATION 2300 VERSYS KIYO
Description
Polysilicon Etch
Configuration
2300e4 KIYO EX
OEM Model Description
The 2300 Versys Kiyo is a manufacturing tool designed for 65 nm and beyond. It provides excellent uniformity and defect control on a reliable wafer transport system. The symmetric chamber and radial tuning features produce uniform etch results for advanced devices. It employs proprietary technology for process repeatability, low defect, and metal contamination results. It supports conventional applications such as gate and shallow trench isolation (STI) and emerging applications such as high k dielectric removal, critical spacer etch, and lithography-enabling etch steps. The system can be upgraded from the 2300 Versys Star, providing an investment-extending strategy.
Documents

No documents

LAM RESEARCH CORPORATION

2300 VERSYS KIYO

verified-listing-icon

Verified

CATEGORY
Dry / Plasma Etch

Last Verified: 6 days ago

Key Item Details

Condition:

Used


Operational Status:

Unknown


Product ID:

62711


Wafer Sizes:

12"/300mm


Vintage:

Unknown


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available

LAM RESEARCH CORPORATION

2300 VERSYS KIYO

verified-listing-icon
Verified
CATEGORY
Dry / Plasma Etch
Last Verified: 6 days ago
listing-photo-5c9671e41acc4a0bafc4dfc6822d787f-https://d2pkkbyngq3xpw.cloudfront.net/moov_media/3.0-assets/photo-coming-soon-small.png
Key Item Details

Condition:

Used


Operational Status:

Unknown


Product ID:

62711


Wafer Sizes:

12"/300mm


Vintage:

Unknown


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Polysilicon Etch
Configuration
2300e4 KIYO EX
OEM Model Description
The 2300 Versys Kiyo is a manufacturing tool designed for 65 nm and beyond. It provides excellent uniformity and defect control on a reliable wafer transport system. The symmetric chamber and radial tuning features produce uniform etch results for advanced devices. It employs proprietary technology for process repeatability, low defect, and metal contamination results. It supports conventional applications such as gate and shallow trench isolation (STI) and emerging applications such as high k dielectric removal, critical spacer etch, and lithography-enabling etch steps. The system can be upgraded from the 2300 Versys Star, providing an investment-extending strategy.
Documents

No documents