AUTOETCH 490
Category
Dry / Plasma EtchOverview
The AutoEtch 490 is part of the AutoEtch family, which was Lam’s initial product line. The first AutoEtch product was sold in January 1982. The AutoEtch product line includes the 490, 590, and 690 series for etching polysilicon, oxide, and aluminum film applications, respectively. Despite being more than fourteen years old, continued improvements in both reliability and performance have enabled Lam to continue to offer the AutoEtch series as a suitable product for film applications involving line-widths of 0.8 micron or greater and wafer sizes of six inches or smaller.
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LAM RESEARCH CORPORATION
AUTOETCH 490
Dry / Plasma EtchVintage: Condition: RefurbishedLast Verified15 days agoLAM RESEARCH CORPORATION
AUTOETCH 490
Dry / Plasma EtchVintage: Condition: UsedLast VerifiedOver 60 days agoLAM RESEARCH CORPORATION
AUTOETCH 490
Dry / Plasma EtchVintage: Condition: UsedLast VerifiedOver 60 days agoLAM RESEARCH CORPORATION
AUTOETCH 490
Dry / Plasma EtchVintage: Condition: UsedLast VerifiedOver 60 days ago
LAM RESEARCH CORPORATION
AUTOETCH 490
Dry / Plasma EtchVintage: Condition: UsedLast VerifiedOver 60 days agoLAM RESEARCH CORPORATION
AUTOETCH 490
Dry / Plasma EtchVintage: Condition: UsedLast VerifiedOver 60 days agoLAM RESEARCH CORPORATION
AUTOETCH 490
Dry / Plasma EtchVintage: Condition: UsedLast VerifiedOver 60 days agoLAM RESEARCH CORPORATION
AUTOETCH 490
Dry / Plasma EtchVintage: Condition: UsedLast VerifiedOver 60 days ago