Description
1. Software abnormal Pending processing ( The machine screen is unresponsive. A bunch of alarm) 2. EC magnetron generator 3. AC magnetron generator 4. EC TMP and TMP controller 5. BR dry pump 6. AC dry pump 7. LC UC Motor 8. chiller 9.EC Dry pump A30W 10.PM parts lackEC WAFER CLAMP 11.PM parts lack EC ELECTRODE COVER 12.PM parts lack EC GROUND ELECTRODEConfiguration
No ConfigurationOEM Model Description
None ProvidedDocuments
No documents
Similar Listings
View All
HITACHI
M-308ATE
CATEGORY
Dry / Plasma Etch
Last Verified: 5 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
142660
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
1. Software abnormal Pending processing ( The machine screen is unresponsive. A bunch of alarm) 2. EC magnetron generator 3. AC magnetron generator 4. EC TMP and TMP controller 5. BR dry pump 6. AC dry pump 7. LC UC Motor 8. chiller 9.EC Dry pump A30W 10.PM parts lackEC WAFER CLAMP 11.PM parts lack EC ELECTRODE COVER 12.PM parts lack EC GROUND ELECTRODEConfiguration
No ConfigurationOEM Model Description
None ProvidedDocuments
No documents