Description
1. Micro computer cooling fan 2. chiller 3. LC Rear airway connector 4. AC Dry Pump A30W 5. BR Dry pump A30W 6. EC Dry pump A30W 7. EC TMP and TMP controller 8.PM parts lack EC WAFER CLAMP 9 PM parts lack EC ELECTRODE COVER 10.PM parts lack EC GROUND ELECTRODEConfiguration
No ConfigurationOEM Model Description
None ProvidedDocuments
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HITACHI
M-308ATE
CATEGORY
Dry / Plasma Etch
Last Verified: 5 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
142659
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
1. Micro computer cooling fan 2. chiller 3. LC Rear airway connector 4. AC Dry Pump A30W 5. BR Dry pump A30W 6. EC Dry pump A30W 7. EC TMP and TMP controller 8.PM parts lack EC WAFER CLAMP 9 PM parts lack EC ELECTRODE COVER 10.PM parts lack EC GROUND ELECTRODEConfiguration
No ConfigurationOEM Model Description
None ProvidedDocuments
No documents