Description
Microscope No missing parts Current Wafer size : 8Configuration
Loader System 1） apply to one size （4”,5”,6” or 8”） 2） Indexer2200，2 cassette station（8”） 3） Auto transfer, auto evacuation and auto loading Pre-aligner 1） work for wafer with notch or flat 2） ensure wafer in the center of microscopic stage Vibration Decoupling 1） effect in the three axis with a height controlled air cushioning system Wobbler (Optional） 1）For macroscopic inspection of the wafer before microscopic inspection Image mode 1）Bright/Dark field Eyepiece 1）HC PLAN 10X Objective 1）5x/0.12 PL FLUOTAR 2）10x/0.30 BD HC PL FLUOTAR 3) 50x/0.80 BD HC PL FLUOTAR 4) 100x/0.90 BD HC PL FLUOTAR 5) 150x/0.90 BD PL APO Auto Beam splitter 1）Motor-Driven Beam splitter LFS 1）autofocus，record z and laser offset Light Intensity 1） store in the inspection program， change with objective 2） adjust intensity through the control bar Diaphragm Module 1） Motor-Driven， programmed for every position on the revolving nosepiece 2） 5 integrate pinhole aperture Stage 1） Use joystick to move the stage 2） Hardware object protection Item Specification Transport method Vacuum transport Cleanroom classification Class 1 FED Std 209d Wafer sizes 100m/125mm/150mm/200mm Number of Cassettes 2 Cassette type SEMI standard Prealignment Contract free Marco defect control Optional wobbler with illumination device User interface Windows NT based inspection & review software VISCON NT Interface Interface for RS 232，SECS，Ethernet Interface SMIF adaption 2 indexer Required vacuum <200 hpa Required compressed air 3.5 bar(max. 6 bar) Power requirements AC 115V/60Hz，230V/50Hz，single phase Max Load 10A Footprint（2 cassette） 1440x900mm Weight（2 cassette） 550kg（1210lbs） Temperature 18 to 25℃，±1° 64 to 78℉，±1° Humidity Max.75% RH Noise generation 70 Db(A)OEM Model Description
The Leica INS 3000 is the new defect review and inspection station. The all stainless-steel system features a fully automatic integrated microscope, including UV and Confocal, and universal wafer handler. The design priorities of the INS 3000 are ergonomy, cleanliness, automation and user-friendliness.The characteristics of the system are 1 to 3 cassette front loading, including SMIF, and a newly developed Windows™ NT based graphical user interface.Documents
KLA / VISTEC / LEICA
INS3000
Verified
CATEGORY
Defect Inspection
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Deinstalled
Product ID:
107109
Wafer Sizes:
4"/100mm, 5"/125mm, 6"/150mm, 8"/200mm
Vintage:
1999
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
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Refurbishment Services
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KLA / VISTEC / LEICA
INS3000
CATEGORY
Defect Inspection
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Deinstalled
Product ID:
107109
Wafer Sizes:
4"/100mm, 5"/125mm, 6"/150mm, 8"/200mm
Vintage:
1999
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available