Description
Defect Review Vacuum toolConfiguration
Main System Active damping subsystem 1 OK Handler System NA Factory Interface SMIF 2 OK Factory Interface SMIF 2 OKOEM Model Description
The eDR-7100, an electron-beam wafer defect review and classification system that utilizes a fourth-generation immersion column and an advanced stage to quickly and accurately re-locate, image and classify yield-critical defects.Documents
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KLA
eDR-7100
Verified
CATEGORY
Defect Inspection
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
95269
Wafer Sizes:
12"/300mm
Vintage:
2013
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Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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View AllKLA
eDR-7100
Verified
CATEGORY
Defect Inspection
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
95269
Wafer Sizes:
12"/300mm
Vintage:
2013
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Defect Review Vacuum toolConfiguration
Main System Active damping subsystem 1 OK Handler System NA Factory Interface SMIF 2 OK Factory Interface SMIF 2 OKOEM Model Description
The eDR-7100, an electron-beam wafer defect review and classification system that utilizes a fourth-generation immersion column and an advanced stage to quickly and accurately re-locate, image and classify yield-critical defects.Documents
No documents