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KLA SURFSCAN SP5
    Description
    BARE WAFER INSPECTION
    Configuration
    config detail attached KLA SP5 Main Components - Integrated Console Bare Wafer Inspection Station Equipment Front End Module (EFEM) 3 Port Wafer Loading Unit Description of Inspection System - Un-patterned wafer inspection platform to incorporate deep-ultraviolet (DUV) illumination. Deep Ultraviolet(DUV) source DUV-specific apertures to enable defect capture on un-patterned thin films High speed stage and advanced imaging computer for enhanced productivity Full-wafer high-resolution haze maps Defect Detection and Classification Capabilities Designed to capture a broad range of challenging defects for 2Xnm/1Xnm process nodes High-productivity rapid automated defect classification Coordinate accuracy to enable rapid defect re-detection and review Integrated, high resolution (~100 mega-pixel), full-wafer SURFmonitor™ haze maps, providing automatedcapture of ultra-fine slip lines and scratches or maps of surface roughness, grain size and other processparameters Surfscan SP5 system feature dramatic advances in sensitivity and throughput over their industry-benchmarkpredecessor, the Surfscan SP3. Inspection Module for the back side of wafers for defects that might deform the wafer shape.
    OEM Model Description
    The Surfscan SP5 is a high-throughput, DUV-sensitive system for inspecting unpatterned wafer surfaces. It’s used in IC, substrate, and equipment manufacturing at the 2X/1Xnm design nodes.
    Documents
    File icon

    kla_surfscan_sp5.pdf

    KLA

    SURFSCAN SP5

    verified-listing-icon

    Verified

    CATEGORY
    Defect Inspection

    Last Verified: Over 30 days ago

    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    115330

    Wafer Sizes:

    Unknown

    Vintage:

    Unknown

    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Similar Listings
    View All
    KLA SURFSCAN SP5

    KLA

    SURFSCAN SP5

    Defect Inspection
    Vintage: 0Condition: Used
    Last VerifiedOver 30 days ago

    KLA

    SURFSCAN SP5

    verified-listing-icon
    Verified
    CATEGORY
    Defect Inspection
    Last Verified: Over 30 days ago
    listing-photo-7d098fee09254387b98c7bf8a6d518c0-https://d2pkkbyngq3xpw.cloudfront.net/moov_media/3.0-assets/photo-coming-soon-small.png
    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    115330

    Wafer Sizes:

    Unknown

    Vintage:

    Unknown

    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    BARE WAFER INSPECTION
    Configuration
    config detail attached KLA SP5 Main Components - Integrated Console Bare Wafer Inspection Station Equipment Front End Module (EFEM) 3 Port Wafer Loading Unit Description of Inspection System - Un-patterned wafer inspection platform to incorporate deep-ultraviolet (DUV) illumination. Deep Ultraviolet(DUV) source DUV-specific apertures to enable defect capture on un-patterned thin films High speed stage and advanced imaging computer for enhanced productivity Full-wafer high-resolution haze maps Defect Detection and Classification Capabilities Designed to capture a broad range of challenging defects for 2Xnm/1Xnm process nodes High-productivity rapid automated defect classification Coordinate accuracy to enable rapid defect re-detection and review Integrated, high resolution (~100 mega-pixel), full-wafer SURFmonitor™ haze maps, providing automatedcapture of ultra-fine slip lines and scratches or maps of surface roughness, grain size and other processparameters Surfscan SP5 system feature dramatic advances in sensitivity and throughput over their industry-benchmarkpredecessor, the Surfscan SP3. Inspection Module for the back side of wafers for defects that might deform the wafer shape.
    OEM Model Description
    The Surfscan SP5 is a high-throughput, DUV-sensitive system for inspecting unpatterned wafer surfaces. It’s used in IC, substrate, and equipment manufacturing at the 2X/1Xnm design nodes.
    Documents
    File icon

    kla_surfscan_sp5.pdf

    Similar Listings
    View All
    KLA SURFSCAN SP5

    KLA

    SURFSCAN SP5

    Defect InspectionVintage: 0Condition: UsedLast Verified:Over 30 days ago