Description
Mask and Wafer InspectionConfiguration
No ConfigurationOEM Model Description
The Surfscan SP5 is a high-throughput, DUV-sensitive system for inspecting unpatterned wafer surfaces. It’s used in IC, substrate, and equipment manufacturing at the 2X/1Xnm design nodes.Documents
No documents
Verified
CATEGORY
Defect Inspection
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
133393
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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KLA
SURFSCAN SP5
CATEGORY
Defect Inspection
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
133393
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Mask and Wafer InspectionConfiguration
No ConfigurationOEM Model Description
The Surfscan SP5 is a high-throughput, DUV-sensitive system for inspecting unpatterned wafer surfaces. It’s used in IC, substrate, and equipment manufacturing at the 2X/1Xnm design nodes.Documents
No documents