SURFSCAN SP5
Category
Defect InspectionOverview
The Surfscan SP5 is a high-throughput, DUV-sensitive system for inspecting unpatterned wafer surfaces. It’s used in IC, substrate, and equipment manufacturing at the 2X/1Xnm design nodes.
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SURFSCAN SP5
Defect InspectionVintage: Condition: UsedLast VerifiedOver 30 days agoKLA
SURFSCAN SP5
Defect InspectionVintage: Condition: UsedLast VerifiedOver 60 days agoKLA
SURFSCAN SP5
Defect InspectionVintage: Condition: UsedLast VerifiedOver 60 days agoKLA
SURFSCAN SP5
Defect InspectionVintage: Condition: UsedLast VerifiedOver 60 days ago