Description

No description

Configuration

Windows System Main S/W Wafer Size 300mm SEMI Notch Facilities Power: 208 VAC, 3W N CDA: > 28.3 Nl /min, > 6.6791 kg /cm2 Vac: > 28.317 l/min, > 700 mm Hg Load port Vacuum 200mm and 300mm FIMS Computer Mouse Keyboard 3.5" FEC computer

OEM Model Description

The Surfscan SP2 is an unpatterned wafer surface inspection tool that uses UV laser technology, darkfield optics, and advanced algorithms to detect defects as small as 30nm. It provides high sensitivity detection on engineered substrates and has a significant throughput increase over the prior-generation tool. It offers a single tool solution for three technology nodes and has comprehensive wafer surface inspection capabilities. It also enables faster root-cause analysis with improved coordinate accuracy and real-time defect classification capability.

Documents

No documents

KLA

SURFSCAN SP2

Verified

Defect Inspection

Last Verified: Over 30 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

150853

Wafer Sizes:

12"/300mm

Vintage:

2006

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

Similar Listings