Description
Metrology / inspection systemConfiguration
Known issues: Not included: KVM; SAC Board FOUP Factory Interface Inspection Unit Robot Handler Chiller Process: Darkfield Inspection Software Version: 9.5.410.2.7 CIM: SECS/GEMOEM Model Description
The Puma 9000 is a modular and extendible dark field defect inspection system that uses KLA-Tencor’s Streak imaging technology to capture critical defects at production throughputs. It combines advanced UV illumination optics with high-speed imaging and a solid-state linear sensor to produce stable and repeatable measurements. Its enhanced sensitivity over existing inspection systems allows for cost-optimized inspection strategies and tighter production control.Documents
No documents
KLA
PUMA 9000
CATEGORY
Defect Inspection
Last Verified: 6 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
154807
Wafer Sizes:
12"/300mm
Vintage:
2005
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Metrology / inspection systemConfiguration
Known issues: Not included: KVM; SAC Board FOUP Factory Interface Inspection Unit Robot Handler Chiller Process: Darkfield Inspection Software Version: 9.5.410.2.7 CIM: SECS/GEMOEM Model Description
The Puma 9000 is a modular and extendible dark field defect inspection system that uses KLA-Tencor’s Streak imaging technology to capture critical defects at production throughputs. It combines advanced UV illumination optics with high-speed imaging and a solid-state linear sensor to produce stable and repeatable measurements. Its enhanced sensitivity over existing inspection systems allows for cost-optimized inspection strategies and tighter production control.Documents
No documents