The Puma 9000 is a modular and extendible dark field defect inspection system that uses KLA-Tencor’s Streak imaging technology to capture critical defects at production throughputs. It combines advanced UV illumination optics with high-speed imaging and a solid-state linear sensor to produce stable and repeatable measurements. Its enhanced sensitivity over existing inspection systems allows for cost-optimized inspection strategies and tighter production control.

KLA inhabits two worlds: one that’s nanometers in scale and one that’s global. This micro and macro view gives us a unique perspective. We see electrons wave and industries transform. When you put deep science together with optimism, big things happen.

Our process-control and process-enabling solutions are designed to boost the innovation speed of the electronics industry. We help our customers achieve leading-edge performance.

PUMA 9000

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