Installed. 
This equipment is a KLA 2135 inspection station, which was upgraded by the OEM from a model 2115.
-It is set up for use with 8 inch wafers loaded via 2 x open cassettes

KLA inhabits two worlds: one that’s nanometers in scale and one that’s global. This micro and macro view gives us a unique perspective. We see electrons wave and industries transform. When you put deep science together with optimism, big things happen.

Our process-control and process-enabling solutions are designed to boost the innovation speed of the electronics industry. We help our customers achieve leading-edge performance.

The KLA 2135 is a wafer inspection system that uses advanced technology to detect all types of defects on all process layers with high capture rates. It has a two- to three-times throughput improvement over the earlier model KLA 2132 and delivers unmatched speed and sensitivity for in-line monitoring of advanced processes. It consistently detects the widest range of yield-relevant defects at the speeds required for high-volume wafer production.

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Defect Inspection

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