Description
DRSEMConfiguration
2xLoad port(Brooks FixLoad), Robot& Aligner(Brooks),TMP(Edward),Ion pump(Varian)OEM Model Description
In July 2009 KLA introduced the eDR-5210, an e-beam review and classification system that features second-generation electromagnetic-field immersion technology, engineered to deliver very high quality images and, consequently, accurate defect classification results.Documents
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KLA
eDR-5210
Verified
CATEGORY
Defect Inspection
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
95271
Wafer Sizes:
12"/300mm
Vintage:
2010
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Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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KLA
eDR-5210
Verified
CATEGORY
Defect Inspection
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
95271
Wafer Sizes:
12"/300mm
Vintage:
2010
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
DRSEMConfiguration
2xLoad port(Brooks FixLoad), Robot& Aligner(Brooks),TMP(Edward),Ion pump(Varian)OEM Model Description
In July 2009 KLA introduced the eDR-5210, an e-beam review and classification system that features second-generation electromagnetic-field immersion technology, engineered to deliver very high quality images and, consequently, accurate defect classification results.Documents
No documents