Description
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Type: CVD SYSTEM, 3 CHAMBER WSi Process Condition: excellent System was running production until shut down Turned of: Nov 2007 De-installed: Dec 2007 Maintenance by : TEL secs/gem: yes CE Mark: yes SW Version UI V4.8HL Main Frame MBB730 (3 chambers) Maintenance Table UI-Rack Additional breaker box MBB-730 Main Power Distribution Power Rack CVD SYSTEM, 3 CHAMBER WSi Process Gases: N2 (ox) 4 l/min N2 (red) 125 l/min Ar 1500 sccm WF6 15 sccm ClF3 1500 sccm DCS 1500 sccmOEM Model Description
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TEL / TOKYO ELECTRON
MB2 730HT
Verified
CATEGORY
CVD (Metalization)
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
28938
Wafer Sizes:
8"/200mm
Vintage:
1996
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Available
Money Back Guarantee
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Transaction Insured by Moov
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Refurbishment Services
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View AllTEL / TOKYO ELECTRON
MB2 730HT
Verified
CATEGORY
CVD (Metalization)
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
28938
Wafer Sizes:
8"/200mm
Vintage:
1996
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
Type: CVD SYSTEM, 3 CHAMBER WSi Process Condition: excellent System was running production until shut down Turned of: Nov 2007 De-installed: Dec 2007 Maintenance by : TEL secs/gem: yes CE Mark: yes SW Version UI V4.8HL Main Frame MBB730 (3 chambers) Maintenance Table UI-Rack Additional breaker box MBB-730 Main Power Distribution Power Rack CVD SYSTEM, 3 CHAMBER WSi Process Gases: N2 (ox) 4 l/min N2 (red) 125 l/min Ar 1500 sccm WF6 15 sccm ClF3 1500 sccm DCS 1500 sccmOEM Model Description
None ProvidedDocuments
No documents