Description

2 Develop, WEE, 3 Low temp hot plate, 2 chill plates, 2 precision chill hot plates Right, 2D, 1WEE, 3LHP, 2PCH, 2CPL, 3TRS Mainframe : Single Block LD: 2ea modified to Asyst

Configuration

2 develop, WEE, 2 low temp hot plate, 1 chill plate Left, 2D, 2HP, 1COL Main Frame: Single Block -> Paired with Nikon

OEM Model Description

Discover the CLEAN TRACK Mark 8, the cutting-edge coater developer system for 5 to 8-inch wafers. Building on the legacy of the acclaimed Mark V, this advanced model delivers enhanced productivity, superior scalability, and exceptional environmental control. Perfect for R&D and high-volume manufacturing, the Mark 8 ensures stable, top-tier performance for diverse applications.

Documents

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TEL / TOKYO ELECTRON

MARK 8

Verified

Coaters & Developers

Last Verified: Over 60 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

105265

Wafer Sizes:

8"/200mm

Vintage:

2000

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