Description
Multi Block (Resist Coater/Developer)Configuration
No ConfigurationOEM Model Description
The CLEAN TRACK™ LITHIUS Pro™ is a state-of-the-art 300mm process coater/developer that offers enhanced productivity and a significantly decreased footprint. It supports advanced immersion lithography through its innovative modules and integrated metrology, providing advanced process control solutions. Additionally, this platform improves upon the core track concepts of OEE (Overall Equipment Efficiency) and lower CoO (Cost of Ownership), making it a cost-effective and efficient solution for your lithography needs.Documents
No documents
TEL / TOKYO ELECTRON
LITHIUS Pro
Verified
CATEGORY
Coaters & Developers
Last Verified: 15 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
94720
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
TEL / TOKYO ELECTRON
LITHIUS Pro
CATEGORY
Coaters & Developers
Last Verified: 15 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
94720
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Multi Block (Resist Coater/Developer)Configuration
No ConfigurationOEM Model Description
The CLEAN TRACK™ LITHIUS Pro™ is a state-of-the-art 300mm process coater/developer that offers enhanced productivity and a significantly decreased footprint. It supports advanced immersion lithography through its innovative modules and integrated metrology, providing advanced process control solutions. Additionally, this platform improves upon the core track concepts of OEE (Overall Equipment Efficiency) and lower CoO (Cost of Ownership), making it a cost-effective and efficient solution for your lithography needs.Documents
No documents