Description
- Left to Right - System Powering Rate: AC 280V, 3-phase for system - Loading Configuration: 4 FOUP - Software Version: Power off - Main Controller: # 3 - No HDDConfiguration
Please see attached configurationOEM Model Description
The CLEAN TRACK™ ACT™ 12 is a 300mm coater/developer that enables stable, high-quality processing and smooth transition from R&D to volume production. It is an in-line model with an exposure tool that has almost the same footprint as the previous track series, but provides higher throughput due to its high-speed transfer system. Uptime has been improved by increasing the reliability of each component and simplifying maintenance. Additionally, the platform supports DUV processing through the use of a ULPA chemical filter and a high precision oven. This makes it a powerful tool for achieving consistent results in both research and production environments.Documents
TEL / TOKYO ELECTRON
ACT 12
Verified
CATEGORY
Coaters & Developers
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
83214
Wafer Sizes:
12"/300mm
Vintage:
2004
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Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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TEL / TOKYO ELECTRON
ACT 12
Verified
CATEGORY
Coaters & Developers
Last Verified: Over 30 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
83214
Wafer Sizes:
12"/300mm
Vintage:
2004
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
- Left to Right - System Powering Rate: AC 280V, 3-phase for system - Loading Configuration: 4 FOUP - Software Version: Power off - Main Controller: # 3 - No HDDConfiguration
Please see attached configurationOEM Model Description
The CLEAN TRACK™ ACT™ 12 is a 300mm coater/developer that enables stable, high-quality processing and smooth transition from R&D to volume production. It is an in-line model with an exposure tool that has almost the same footprint as the previous track series, but provides higher throughput due to its high-speed transfer system. Uptime has been improved by increasing the reliability of each component and simplifying maintenance. Additionally, the platform supports DUV processing through the use of a ULPA chemical filter and a high precision oven. This makes it a powerful tool for achieving consistent results in both research and production environments.Documents
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