TEL / TOKYO ELECTRON
MARK V
Coaters and Developers
Vintage: Unknown
Condition: As-Is
Last Verified
19 days ago
The CLEAN TRACK™ Mark-V realized various innovative technologies such as stacked clean oven module layout and high-speed wafer handling robotics, etc, so dramatically changed the concept of the conventional photoresist systems and set the worldwide standards for them. 30 year old coater, generally 75,100,150mm wafers, 60wph - open system.
3
Inspection, Insurance, Appraisal, Logistics
Coaters and Developers
Coaters and Developers
Coaters and Developers