Description
Not working Missing: Main Computer Resist Pump Bypack temperature ControllerConfiguration
Spin units 2 Developer / 1 Coater Modules Carrier station Developer WEE Coater Interface unit Bypack unitOEM Model Description
The CLEAN TRACK™ Mark-V is a 30-year-old coater that has revolutionized the concept of conventional photoresist systems. It has introduced various innovative technologies such as a stacked clean oven module layout and high-speed wafer handling robotics, setting worldwide standards for photoresist systems. The Mark-V is capable of handling 75, 100, and 150mm wafers at a rate of 60 wafers per hour and is an open system. It’s an impressive piece of technology!Documents
No documents
TEL / TOKYO ELECTRON
MARK V
Verified
CATEGORY
Coaters & Developers
Last Verified: Over 60 days ago
Key Item Details
Condition:
Parts Tool
Operational Status:
Unknown
Product ID:
106142
Wafer Sizes:
6"/150mm
Vintage:
1992
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Similar Listings
View All
TEL / TOKYO ELECTRON
MARK V
Coaters & DevelopersVintage: 0Condition: Used
Last VerifiedOver 60 days ago
TEL / TOKYO ELECTRON
MARK V
Coaters & DevelopersVintage: 0Condition: Used
Last VerifiedOver 60 days ago
TEL / TOKYO ELECTRON
MARK V
Coaters & DevelopersVintage: 0Condition: Used
Last VerifiedOver 60 days ago
TEL / TOKYO ELECTRON
MARK V
CATEGORY
Coaters & Developers
Last Verified: Over 60 days ago
Key Item Details
Condition:
Parts Tool
Operational Status:
Unknown
Product ID:
106142
Wafer Sizes:
6"/150mm
Vintage:
1992
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Not working Missing: Main Computer Resist Pump Bypack temperature ControllerConfiguration
Spin units 2 Developer / 1 Coater Modules Carrier station Developer WEE Coater Interface unit Bypack unitOEM Model Description
The CLEAN TRACK™ Mark-V is a 30-year-old coater that has revolutionized the concept of conventional photoresist systems. It has introduced various innovative technologies such as a stacked clean oven module layout and high-speed wafer handling robotics, setting worldwide standards for photoresist systems. The Mark-V is capable of handling 75, 100, and 150mm wafers at a rate of 60 wafers per hour and is an open system. It’s an impressive piece of technology!Documents
No documents