Description

Photo Resist

Configuration

Photo

OEM Model Description

The CLEAN TRACK™ Mark-V is a 30-year-old coater that has revolutionized the concept of conventional photoresist systems. It has introduced various innovative technologies such as a stacked clean oven module layout and high-speed wafer handling robotics, setting worldwide standards for photoresist systems. The Mark-V is capable of handling 75, 100, and 150mm wafers at a rate of 60 wafers per hour and is an open system. It’s an impressive piece of technology!

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TEL / TOKYO ELECTRON

MARK V

Verified

Coaters & Developers

Last Verified: 10 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

139292

Wafer Sizes:

6"/150mm

Vintage:

1991

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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