Description
Sedimentation tank (collection container), a DTU1531 (chiller unit), and two duct units for exhausting the process chambers!Configuration
DFS8960 1,400 (W) × 3,311.5 (D) × 1,870 (H) mm (2,194 mm (H) if the status indicator is included) Vacuum unit 500 (W) × 815 (D) × 670 (H) mm Water temperature control unit (DTU152) [Optional accessory] 450 (W) × 1,296 (D) × 1,235 (H) mmDFS8960 1,400 (W) × 3,311.5 (D) × 1,870 (H) mm (2,194 mm (H) if the status indicator is included) Vacuum unit 500 (W) × 815 (D) × 670 (H) mm Water temperature control unit (DTU152) [Optional accessory] 450 (W) × 1,296 (D) × 1,235 (H) mm DFS8960 Approx. 5,000 kg Vacuum unit Approx. 75 kg Water temperature control unit (DTU152) [Optional accessory] Approx. 310 kgOEM Model Description
2011 Developed the ultra high precision DFS8960 surface planer which supports 300 mm wafers. Fully-automatic surface planer for Φ300 mm wafers Φ300 mm 2 axes, 2 chuck tables Planarization Ultrahigh-precision planarization technology using a diamond bit The DISCO surface planer provides solutions for high-precision planarization of ductile materials such as metals, resins, and their composites as well as solutions for reducing bump height variation and surface roughness.Documents
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DISCO
DFS8960
CATEGORY
CMP
Last Verified: 13 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
125519
Wafer Sizes:
8"/200mm, 12"/300mm
Vintage:
2014
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Sedimentation tank (collection container), a DTU1531 (chiller unit), and two duct units for exhausting the process chambers!Configuration
DFS8960 1,400 (W) × 3,311.5 (D) × 1,870 (H) mm (2,194 mm (H) if the status indicator is included) Vacuum unit 500 (W) × 815 (D) × 670 (H) mm Water temperature control unit (DTU152) [Optional accessory] 450 (W) × 1,296 (D) × 1,235 (H) mmDFS8960 1,400 (W) × 3,311.5 (D) × 1,870 (H) mm (2,194 mm (H) if the status indicator is included) Vacuum unit 500 (W) × 815 (D) × 670 (H) mm Water temperature control unit (DTU152) [Optional accessory] 450 (W) × 1,296 (D) × 1,235 (H) mm DFS8960 Approx. 5,000 kg Vacuum unit Approx. 75 kg Water temperature control unit (DTU152) [Optional accessory] Approx. 310 kgOEM Model Description
2011 Developed the ultra high precision DFS8960 surface planer which supports 300 mm wafers. Fully-automatic surface planer for Φ300 mm wafers Φ300 mm 2 axes, 2 chuck tables Planarization Ultrahigh-precision planarization technology using a diamond bit The DISCO surface planer provides solutions for high-precision planarization of ductile materials such as metals, resins, and their composites as well as solutions for reducing bump height variation and surface roughness.Documents
No documents