Description

Asset Description NA Software Version NA CIM GEM Process CD measurement Excluded Items List (Pumps, Chillers & Abatement are all excluded)

Configuration

System Type Description Quantity Handler System Wafer handler unit 1 Factory Interface SMIF 2 Others NA Main System Main unit 1 Options System NA

OEM Model Description

The Hitachi S-9220 CD-SEM is a high-resolution, automated tool for precise CD measurements. It is designed for inline process control and development in semiconductor manufacturing. With programmable addressing and pattern recognition, it accurately measures various structures. It supports 6-inch and 8-inch wafer loading and provides easy data access via Hitachi software and a Data Station. The S-9220 CD-SEM is an essential tool for semiconductor manufacturers, offering superior resolution and automation for reliable CD measurements.

Documents

Hitachi S9220.pdf

HITACHI

S-9220

Verified

CD-SEM

Last Verified: 14 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

136276

Wafer Sizes:

8"/200mm, 12"/300mm

Vintage:

2001

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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