Description
Wafer size: 6 inch Robot: TAZMO Measuring size: 0.1-10µm SECS/GEM: available, S6F9/S2F17/S2F18 have been used Objective lens: highly-excited low aberration lens Voltage: 500-1300V CCD Camera: 1.2mm square field, black & white CCD camera, 110x magnification (optical microscope image) SW Version: System 15.22, HOST/SEM 15.20, IPS: 15.21(4500), Stage: 01.07, EVAC: 02.01, HV: 04.02, WT: 01.11M OS: HP-UX Vintage: 2000 Load port, SMIF or Cassette? : open cassette What type is the end station? 3 load ports Missing/defective parts: HV-Controller missing, very slight leakage in column in tip area -> tip lifetime <= 1 year, turbomolecular pumps + Controller missing, Scroll pumps and Chiller missingConfiguration
Robot: TAZMO Measuring size: 0.1-10µm SECS/GEM: available, S6F9/S2F17/S2F18 have been used Objective lens: highly-excited low aberration lens Voltage: 500-1300V CCD Camera: 1.2mm square field, black & white CCD camera, 110x magnification (optical microscope image) SW Version: System 15.22, HOST/SEM 15.20, IPS: 15.21(4500), Stage: 01.07, EVAC: 02.01, HV: 04.02, WT: 01.11M OS: HP-UX Load port, SMIF or Cassette? : open cassette What type is the end station? 3 load portsOEM Model Description
The Hitachi S-9220 CD-SEM is a high-resolution, automated tool for precise CD measurements. It is designed for inline process control and development in semiconductor manufacturing. With programmable addressing and pattern recognition, it accurately measures various structures. It supports 6-inch and 8-inch wafer loading and provides easy data access via Hitachi software and a Data Station. The S-9220 CD-SEM is an essential tool for semiconductor manufacturers, offering superior resolution and automation for reliable CD measurements.Documents
Similar Listings
View All
HITACHI
S-9220
CATEGORY
CD-SEM
Last Verified: 14 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
133571
Wafer Sizes:
6"/150mm
Vintage:
2000
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available