Description

Software Version: NA CIM: GEM Process: CD MEASUREMENT

Configuration

CDSEM Hardware Configuration System Type Description Quantity Status Main System Main tool 1 OK Options System Optic system OK Others OK Factory Interface SMIF 2 OK Handler System Robot system 1 OK

OEM Model Description

The Hitachi S-9220 CD-SEM is a high-resolution, automated tool for precise CD measurements. It is designed for inline process control and development in semiconductor manufacturing. With programmable addressing and pattern recognition, it accurately measures various structures. It supports 6-inch and 8-inch wafer loading and provides easy data access via Hitachi software and a Data Station. The S-9220 CD-SEM is an essential tool for semiconductor manufacturers, offering superior resolution and automation for reliable CD measurements.

Documents

HITACHI S-9220.pdf

HITACHI

S-9220

Verified

CD-SEM

Last Verified: Over 60 days ago

Key Item Details

Condition:

Used

Operational Status:

Installed / Running

Product ID:

133417

Wafer Sizes:

8"/200mm

Vintage:

2020

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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