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CD SEM Energy Dispersive Spectroscopy (EDS) Detector Oxford EDS Detector Aztec Software EDS Spectra Data Collection System Specifications Resolution (Secondary Electron) - 4nm, Tilt=0, V=1kV Magnification -100X - 200,000X Accelerating Voltage - 0.7 - 15 kV Optical Microscope - 110X Repeatability - 5nm (3-Sigma) or 1% Wafer Size - 200mm Gun - Thermal Field Emission Measurement Modes - Manual or Automatic using pattern recognition - Cursor and line profile measurement Tilt - 0-60 degrees Rotation - 360 Degrees Mask Inspection - 6 in mask holder Sample Cross-Sections - 10 Stubs max - Max size 10mm x 19mm x 1.2mm Software - Multi-point Measurement - Image Archiving Low Voltage Operation - 0.7 - 1kV Automated CD Measurements Automatic Functions - Automatic Focus Correction (AFC) - Automatic Assignation Correction (AST) - Automatic Brightness & Contrast Control (ABCC) - Automatic Image Centering (RISM) - Automatic Beam BlankingOEM Model Description
S-7840 review SEM has been incorporated with (1) ADR (automatic defect review) and ADC (automatic defect classification), (2) data interface with various inspection equipment, (3) an interface which transfers review results with SEM images showing the defects to an advanced data analysis system, and (4) defect sampling function which allows selection of type of defects for reviewing.Documents
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HITACHI
S-7840
CATEGORY
CD-SEM
Last Verified: 19 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
140292
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available