GAMMA 2100
Category
Ashers / Plasma CleanerOverview
The GAMMA 2100 200mm photoresist removal system uses a plasma source to strip photoresist. The GAMMA architecture features a multi-station sequential processing design with six strip stations, resulting in high wafer throughput with a minimal number of critical subsystems.
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LAM RESEARCH / NOVELLUS / GASONICS
GAMMA 2100
Ashers / Plasma CleanerVintage: Condition: UsedLast VerifiedOver 30 days agoLAM RESEARCH / NOVELLUS / GASONICS
GAMMA 2100
Ashers / Plasma CleanerVintage: 2002Condition: UsedLast VerifiedOver 60 days agoLAM RESEARCH / NOVELLUS / GASONICS
GAMMA 2100
Ashers / Plasma CleanerVintage: Condition: UsedLast VerifiedOver 60 days ago
