Description
KrF ScannerConfiguration
No ConfigurationOEM Model Description
The FPA-5000ES3 is a KrF scanner with a 0.73 NA, designed for 130nm production. It is built on the Canon FPA-5000 scanning platform and incorporates experience from previous models. The ES3 has significant refinements, particularly in lens performance, and employs unique lens elements using Canon’s “wavefront engineering” method. Lens testing results show values much smaller than the manufacturing target, in some cases by as much as 30-40%.Documents
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CANON
FPA-5000ES3
Verified
CATEGORY
193 nm Step and Scan
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
99076
Wafer Sizes:
8"/200mm
Vintage:
2001
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CANON
FPA-5000ES3
Verified
CATEGORY
193 nm Step and Scan
Last Verified: 25 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
99076
Wafer Sizes:
8"/200mm
Vintage:
2001
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
KrF ScannerConfiguration
No ConfigurationOEM Model Description
The FPA-5000ES3 is a KrF scanner with a 0.73 NA, designed for 130nm production. It is built on the Canon FPA-5000 scanning platform and incorporates experience from previous models. The ES3 has significant refinements, particularly in lens performance, and employs unique lens elements using Canon’s “wavefront engineering” method. Lens testing results show values much smaller than the manufacturing target, in some cases by as much as 30-40%.Documents
No documents