FPA-5000ES3
Category
193 nm Step and ScanOverview
The FPA-5000ES3 is a KrF scanner with a 0.73 NA, designed for 130nm production. It is built on the Canon FPA-5000 scanning platform and incorporates experience from previous models. The ES3 has significant refinements, particularly in lens performance, and employs unique lens elements using Canon’s “wavefront engineering” method. Lens testing results show values much smaller than the manufacturing target, in some cases by as much as 30-40%.
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- FPA-5000ES3193 nm Step and ScanVintage: 2001Condition: UsedLast VerifiedOver 60 days ago
- FPA-5000ES3193 nm Step and ScanVintage: 2001Condition: UsedLast VerifiedOver 60 days ago
- FPA-5000ES3193 nm Step and ScanVintage: 2001Condition: UsedLast VerifiedOver 60 days ago
- FPA-5000ES3193 nm Step and ScanVintage: 2001Condition: UsedLast VerifiedOver 60 days ago