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DNS / DAINIPPON / SCREEN SS 3000 AR

Created On
October 26th, 2021
Guaranteed Accurate as of
a month ago
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October 26th, 2021
a month ago
Copied!
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Product ID
47697
Make
DNS / DAINIPPON / SCREEN
Model
SS 3000 AR
Category
Scrubbers
Quantity
1
Serial Number
-
Vintage
2006
Wafer Size
12"/300mm
Condition
As-Is
Other Information
Configuration
Config: 2f2d Chamber A Process : Wafer surface clean Chuck : Vacuum Chuck SPRAY : Soft Spray N2 10~100NL/min Rinse :DIW/ CO2 INJENCTION ,resistivity <1MΩ Spin DRY : 3000rpm Spin Dry only Chamber B Process : Wafer surface clean Chuck : Vacuum Chuck SPRAY : Soft Spray N2 10~100NL/min Rinse :DIW/ CO2 INJENCTION ,resistivity <1MΩ Spin DRY : 3000rpm Spin Dry only Chamber C Process : Wafer Backside clean Chuck : Mechanical Chuck SPRAY : None Burush : PVA Burush Rinse :DIW/ CO2 INJENCTION ,resistivity <1MΩ Spin DRY : 2400rpm Spin Dry only Chamber D Process : Wafer Backside clean Chuck : Mechanical Chuck SPRAY : None Burush : PVA Burush Rinse :DIW/ CO2 INJENCTION ,resistivity <1MΩ Spin DRY : 2400rpm Spin Dry only Software Version (include revision #) V242B000 System Power Rating 208AC 3-phase Loading Configuration 3 load ports Vendor Chm Model Chemicals / Gases Used (not to use Micron Proprietary names) U03 SS(Surface) CO2Water U04 SS(Surface) CO2Water U05 SSR(Backside) CO2Water U06 SSR(Backside) CO2Water
Description
-
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Services Available for this Listing
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Installation
Refurbished
Various / Other
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OEM Model Description
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