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SCREEN / DNS / DAINIPPON SCREEN SU-3200
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    Key Item Details

    Condition:Used

    Operational Status:Deinstalled / Uncrated

    Product ID:53562

    Wafer Sizes:12"/300mm

    Vintage:2014

    Description

    No description available

    Configuration

    Process : Spray Clean Process: SC1 / DFH Chamber ; (12) Chambers wet process tool Factory interface: (4) FOUP KAWASAKI High speeds IR/CR handler

    Documents
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    OEM Model Description

    The AQUASPIN SU-3200 single wafer cleaning system is able to spray chemical to achieve individual wafer cleaning.

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