The AQUASPIN SU-3200 single wafer cleaning system is able to spray chemical to achieve individual wafer cleaning.

Screen Semiconductor offers a variety of products throughout the semiconductor manufacturing processes: Screen offer tools for the following processes: Wafer cleaning system, measurement system, coat/develop track, inspection system, annealing system, and advanced packaging lithography.

SCREEN / DNS / DAINIPPON SCREEN

SU-3200

FEOL CLEAN

Hardware (Fab) :
System Type             Description           Quantity    Status
Others                                                        

Hardware (Subfab / Auxilliary Units)
Description           Qty      Status
MKS PrimO3           1           OK
Fire System               1           OK
               

Missing/Faulty Parts / Accessories List
Description                                     Qty
DIABLED CHAMBERS 12/12/22        6

SCREEN DNS SU3200.pdf

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FEOL CLEAN

Hardware (Fab) :
System Type             Description           Quantity    Status
Options System    HF CABINET 150:1           1            OK
Others                                                           1            OK 

Hardware (Subfab / Auxiliary Units)
Description           Qty      Status
PUMP UP UNIT       2           OK
                                             OK
O3PRIM                  1            OK

Missing/Faulty Parts / Accessories List
Description                                     Qty
DIABLED CHAMBERS 12/12/22        6

SCREEN DNS SU-3200.pdf

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12 CHAMBER AQUASPIN

Hardware (Fab) :
System Type             Description      Quantity    Status
Handler System         KAWASAKI           1              OK
Factory Interface        FOUP                   4              OK
Options System          none                    1             OK
Others                        na                         1             OK

Hardware (Subfab / Auxilliary Units) :
Description           Qty      Status
NanoA cabinet       1           OK


Missing/Faulty Parts / Accesorries List :
Description       Qty
None                  1


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6" Fab For Sale from Moov - Click Here to Learn More

6" Fab For Sale from Moov - Click Here to Learn More

6" Fab For Sale from Moov - Click Here to Learn More

SU-3200

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SU-3200