Description
GaN SEZConfiguration
No ConfigurationOEM Model Description
The SEZ 4200 is a single wafer processing system that combines SEZ’s process capability with high throughput and reliability. It uses a dual arm robot to transport 200mm wafers from four cassettes to four process chambers, using one media for all chambers. The media can be recycled, heated, and filtered within the system or used in single pass mode. The system has an object-oriented software architecture with a Sematech compliant GUI and touch screen for easy operation. It has a cost-effective throughput/footprint ratio and competitive CoO. Options like Endpoint Detection System, ozone processing, and SMIF ensure application solutions that meet and exceed customer needs. Supported applications include polymer removal, metal pre-clean, and layer stripping.Documents
No documents
Verified
CATEGORY
Wet Etch
Last Verified: 25 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
151455
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
LAM RESEARCH / SEZ
SP4200
CATEGORY
Wet Etch
Last Verified: 25 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
151455
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
GaN SEZConfiguration
No ConfigurationOEM Model Description
The SEZ 4200 is a single wafer processing system that combines SEZ’s process capability with high throughput and reliability. It uses a dual arm robot to transport 200mm wafers from four cassettes to four process chambers, using one media for all chambers. The media can be recycled, heated, and filtered within the system or used in single pass mode. The system has an object-oriented software architecture with a Sematech compliant GUI and touch screen for easy operation. It has a cost-effective throughput/footprint ratio and competitive CoO. Options like Endpoint Detection System, ozone processing, and SMIF ensure application solutions that meet and exceed customer needs. Supported applications include polymer removal, metal pre-clean, and layer stripping.Documents
No documents