Description
No descriptionConfiguration
PVDOEM Model Description
The Spin Etcher 201 is a single wafer etching machine that can chemically etch one side of a wafer without damaging the other. It can handle 6" to 8" wafers and use up to three different chemicals in one process cycle. The system is fully automatic, with a cassette-to-cassette handling system, and has a flexible control system. It also has a minimized clean room footprint due to its Through-the-wall design.Documents
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Verified
CATEGORY
Wet Etch
Last Verified: Over 60 days ago
Key Item Details
Condition:
Parts Tool
Operational Status:
Unknown
Product ID:
15850
Wafer Sizes:
8"/200mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH / SEZ
SP201
CATEGORY
Wet Etch
Last Verified: Over 60 days ago
Key Item Details
Condition:
Parts Tool
Operational Status:
Unknown
Product ID:
15850
Wafer Sizes:
8"/200mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
PVDOEM Model Description
The Spin Etcher 201 is a single wafer etching machine that can chemically etch one side of a wafer without damaging the other. It can handle 6" to 8" wafers and use up to three different chemicals in one process cycle. The system is fully automatic, with a cassette-to-cassette handling system, and has a flexible control system. It also has a minimized clean room footprint due to its Through-the-wall design.Documents
No documents