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6" Fab For Sale from Moov - Click Here to Learn More

LAM RESEARCH / SEZ SP102

Description

No missing parts

Configuration

102N -Spin processor

OEM Model Description

The SEZ 102 is a Spin-Processor for single wafer processing. It supports 3, 4, 5, and 6-inch wafers on 150mm and has multiple vertically integrated process chambers. The system is fully automatic and can recycle, heat, and filter chemical solutions. It supports a wide range of applications including photolithography yield enhancement, back surface metal clean, back surface film removal, bevel/edge film removal, silicon etch, stress relief, post-etch polymer removal, oxide etching, post CMP clean, film structuring (BEOL), wafer manufacturing enhancement, and GaAs processing.

Documents

SEZ.pdf

LAM RESEARCH / SEZ

SP102

verified-listing-icon

Verified

CATEGORY

Wet Etch

Last Verified: Over 60 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

89163

Wafer Sizes:

6"/150mm

Vintage:

2003

Have Additional Questions?

Logistics Support

Available

Money Back Guarantee

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

Similar Listings

LAM RESEARCH / SEZ SP102

LAM RESEARCH / SEZ

SP102

Vintage: 2003Condition: Used

Last VerifiedOver 60 days ago

LAM RESEARCH / SEZ

SP102

verified-listing-icon

Verified

CATEGORY

Wet Etch

Last Verified: Over 60 days ago

listing-photo-e2f5f7b05eba43798c1f181f2ddc7f03-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/47087/e2f5f7b05eba43798c1f181f2ddc7f03/4324b52793a94687a2e7bb819e99751f_cc72b4197ed44a1fb72a2c1a33736d06_mw.png

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Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

89163

Wafer Sizes:

6"/150mm

Vintage:

2003

Have Additional Questions?

Logistics Support

Available

Money Back Guarantee

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

Description

No missing parts

Configuration

102N -Spin processor

OEM Model Description

The SEZ 102 is a Spin-Processor for single wafer processing. It supports 3, 4, 5, and 6-inch wafers on 150mm and has multiple vertically integrated process chambers. The system is fully automatic and can recycle, heat, and filter chemical solutions. It supports a wide range of applications including photolithography yield enhancement, back surface metal clean, back surface film removal, bevel/edge film removal, silicon etch, stress relief, post-etch polymer removal, oxide etching, post CMP clean, film structuring (BEOL), wafer manufacturing enhancement, and GaAs processing.

Documents

SEZ.pdf

Similar Listings

LAM RESEARCH / SEZ SP102

LAM RESEARCH / SEZ

SP102

Wet EtchVintage: 2003Condition: UsedLast Verified:Over 60 days ago