Description
Batch WaferProcessingConfiguration
No ConfigurationOEM Model Description
The UW300Z is a 300mm cleaning system developed by Tokyo Electron (TEL) that offers industry-leading reliability and reduced cost of ownership. Like TEL’s UW8000 Cleaning System, the UW300Z has performed extremely well under the exacting requirements of TEL’s extensive testing. The system features Z-axis handling, which allows for smaller tank volumes, thus reducing the use of DIW and chemical consumption, and improving waste management. The UW300Z has the capability for both conventional and combo-tank (in-situ) processing and offers full FEOL surface preparation solutions. This makes it an excellent choice for those looking to improve their cleaning processes while reducing costs.Documents
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TEL / TOKYO ELECTRON
UW300Z
Verified
CATEGORY
Wet Benches - Auto
Last Verified: Over 30 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
115271
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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TEL / TOKYO ELECTRON
UW300Z
CATEGORY
Wet Benches - Auto
Last Verified: Over 30 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
115271
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Batch WaferProcessingConfiguration
No ConfigurationOEM Model Description
The UW300Z is a 300mm cleaning system developed by Tokyo Electron (TEL) that offers industry-leading reliability and reduced cost of ownership. Like TEL’s UW8000 Cleaning System, the UW300Z has performed extremely well under the exacting requirements of TEL’s extensive testing. The system features Z-axis handling, which allows for smaller tank volumes, thus reducing the use of DIW and chemical consumption, and improving waste management. The UW300Z has the capability for both conventional and combo-tank (in-situ) processing and offers full FEOL surface preparation solutions. This makes it an excellent choice for those looking to improve their cleaning processes while reducing costs.Documents
No documents