
Description
SU3100 - 8ch - MPC 1-8 - SC1, Ammonia, Peroxide, HF, IPA Software Version - 258000 CIM - E84, SECS/GEM, GEM300, Interface A Process - Hot Ultra-DHF ConfigurationConfiguration
8ch - MPC 1-8 - TMAHOEM Model Description
The 'SU-3100' Single-wafer cleaning system. Up to 8 built-in chambers and superior 300 wafer per hour productivity.Documents
CATEGORY
Wet Benches - Auto
Last Verified: 11 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
136402
Wafer Sizes:
12"/300mm
Vintage:
2012
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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SU-3100
CATEGORY
Wet Benches - Auto
Last Verified: 11 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
136402
Wafer Sizes:
12"/300mm
Vintage:
2012
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available