Description
Post CMP ScrubberConfiguration
Dual brush and top side brush chambers, spin dry Missing parts: HLS cards-> Shutdown during inspection Gas - 1:100 DHF PROGRESS TYPE: WET/ CMP COMPONENT : SERVOPACK SGD-02BH MX-7500 TBC BRUSH LOAD CELL AMP PRE-TECH FINEJET GENERATOR 0.750KVA TRANSFOMER FA-21000A PC HFC-VWE HITACHI INVERTER HF CIRCULATION FILTEROEM Model Description
The new post-CMP cleaner improves throughput by 50% by reducing wafer transfer and drying time. Footprint is also reduced by optimally arranging each processing unit. Moreover, inline configuration with chemical mechanical polisher is also possible.Documents
No documents
CATEGORY
Wet Benches - Auto
Last Verified: 5 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
119531
Wafer Sizes:
8"/200mm
Vintage:
1999
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Similar Listings
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SCREEN / DNS / DAINIPPON SCREEN
AS-2000
CATEGORY
Wet Benches - Auto
Last Verified: 5 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
119531
Wafer Sizes:
8"/200mm
Vintage:
1999
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Post CMP ScrubberConfiguration
Dual brush and top side brush chambers, spin dry Missing parts: HLS cards-> Shutdown during inspection Gas - 1:100 DHF PROGRESS TYPE: WET/ CMP COMPONENT : SERVOPACK SGD-02BH MX-7500 TBC BRUSH LOAD CELL AMP PRE-TECH FINEJET GENERATOR 0.750KVA TRANSFOMER FA-21000A PC HFC-VWE HITACHI INVERTER HF CIRCULATION FILTEROEM Model Description
The new post-CMP cleaner improves throughput by 50% by reducing wafer transfer and drying time. Footprint is also reduced by optimally arranging each processing unit. Moreover, inline configuration with chemical mechanical polisher is also possible.Documents
No documents
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