Description
No descriptionConfiguration
AKRION Rearmount - Wetbench Application: etching Process flow: HF, HNO3, NH4F, IPA, DIW Front- or rear-mount: rear Process Robot End-Effector: Controller: control zone main components pneumatic solenoid panel, heated tank control unit, digital I/O boards (OPTO22) Transfer robot: robot transfer arm, free standing unit Common I/O Station: separate Wafer transfer system: No Dual buffer queues: PFA Cassettes: yes Configuration of each wet process modules: Tank1: HF Tank3: HNO3, HF and DI-water Tank5: HF + NH4F Tank7: HF Vapor dryer: IPA Pumps: SECS: yesOEM Model Description
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AKRION
REARMOUNT
CATEGORY
Wet Benches - Auto
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
132896
Wafer Sizes:
6"/150mm
Vintage:
1992
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
AKRION Rearmount - Wetbench Application: etching Process flow: HF, HNO3, NH4F, IPA, DIW Front- or rear-mount: rear Process Robot End-Effector: Controller: control zone main components pneumatic solenoid panel, heated tank control unit, digital I/O boards (OPTO22) Transfer robot: robot transfer arm, free standing unit Common I/O Station: separate Wafer transfer system: No Dual buffer queues: PFA Cassettes: yes Configuration of each wet process modules: Tank1: HF Tank3: HNO3, HF and DI-water Tank5: HF + NH4F Tank7: HF Vapor dryer: IPA Pumps: SECS: yesOEM Model Description
None ProvidedDocuments
No documents