Description
No descriptionConfiguration
AKRION Rearmount - Wetbench Application: polymer removal Process flow: EKC, IPA, DI Front- or rear-mount: rear Process Robot End-Effector: Controller: control zone main components pneumatic solenoid panel, heated tank control unit, digital I/O boards (OPTO22) Transfer robot: robot transfer arm, free standing unit Common I/O Station: separate Wafer transfer system: NA Dual buffer queues: PFA Cassettes: Quartz carriers Configuration of each wet process modules: Tank 1: Static tank EKC Tank 4 Recirc tank EKC Tank 2,3: IPA Tank 5 DI tank Vapor dryer with IPA Pumps: SECS: Yes Software: DOS Operating system: 386 computer/AkrionOEM Model Description
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AKRION
REARMOUNT
CATEGORY
Wet Benches - Auto
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
132894
Wafer Sizes:
6"/150mm
Vintage:
1992
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
AKRION Rearmount - Wetbench Application: polymer removal Process flow: EKC, IPA, DI Front- or rear-mount: rear Process Robot End-Effector: Controller: control zone main components pneumatic solenoid panel, heated tank control unit, digital I/O boards (OPTO22) Transfer robot: robot transfer arm, free standing unit Common I/O Station: separate Wafer transfer system: NA Dual buffer queues: PFA Cassettes: Quartz carriers Configuration of each wet process modules: Tank 1: Static tank EKC Tank 4 Recirc tank EKC Tank 2,3: IPA Tank 5 DI tank Vapor dryer with IPA Pumps: SECS: Yes Software: DOS Operating system: 386 computer/AkrionOEM Model Description
None ProvidedDocuments
No documents