Description
Tool is set up to run 8" and 12". The faith transfer system is set up for both sizes as well. Ozone generator is the only mentionable missing part. There may be some minor fittings and things along those lines. All other major components are included, some listed below after double confirming. Dryer is intact Robot intact Freight transfer system intact Control module intact Dual tanks intact Water heaters intact *Megasonics - have not been used in a while, they typically have to be replaced anyway so this shouldn't be an issue.Configuration
Process - SC1, HF, O3 2 process tanks and a Yield up dryer Process is insitu, using SC1 and then HF/ozone, but this can be modified The ozone module is no longer part of the tool. 200/300mm I-clean gama with cassette less process.OEM Model Description
The AKRION GAMA is a series of automated wet stations that are flexible and modular. They are suitable for a wide variety of cleaning, etching and stripping applications for bare and reclaimed silicon wafers, IC devices, MEMS and photomasks. The GAMA series is designed to provide high throughput and precision cleaning for semiconductor manufacturing processes.Documents
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AKRION
GAMA
Verified
CATEGORY
Wet Benches - Auto
Key Item Details
Condition:
Used
Operational Status:
Deinstalled / Uncrated
Product ID:
39987
Wafer Sizes:
Unknown
Vintage:
Unknown
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Available
Money Back Guarantee
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Refurbishment Services
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AKRION
GAMA
Verified
CATEGORY
Wet Benches - Auto
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Deinstalled / Uncrated
Product ID:
39987
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Tool is set up to run 8" and 12". The faith transfer system is set up for both sizes as well. Ozone generator is the only mentionable missing part. There may be some minor fittings and things along those lines. All other major components are included, some listed below after double confirming. Dryer is intact Robot intact Freight transfer system intact Control module intact Dual tanks intact Water heaters intact *Megasonics - have not been used in a while, they typically have to be replaced anyway so this shouldn't be an issue.Configuration
Process - SC1, HF, O3 2 process tanks and a Yield up dryer Process is insitu, using SC1 and then HF/ozone, but this can be modified The ozone module is no longer part of the tool. 200/300mm I-clean gama with cassette less process.OEM Model Description
The AKRION GAMA is a series of automated wet stations that are flexible and modular. They are suitable for a wide variety of cleaning, etching and stripping applications for bare and reclaimed silicon wafers, IC devices, MEMS and photomasks. The GAMA series is designed to provide high throughput and precision cleaning for semiconductor manufacturing processes.Documents
No documents