The AKRION GAMA is a series of automated wet stations that are flexible and modular. They are suitable for a wide variety of cleaning, etching and stripping applications for bare and reclaimed silicon wafers, IC devices, MEMS and photomasks. The GAMA series is designed to provide high throughput and precision cleaning for semiconductor manufacturing processes.

Akrion focuses on multiple wet process solutions for semiconductor applications where high yield and low cost of ownership is a challenge. Each process step in device manufacturing presents an opportunity for contamination, which can result in defect formation and device failure, therefore critical cleaning is an integral part of our equipment’s capabilities.

AKRION

GAMA

Tool is set up to run 8" and 12". The faith transfer system is set up for both sizes as well.

Ozone generator is the only mentionable missing part. There may be some minor fittings and things along those lines. All other major components are included, some listed below after double confirming. 

Dryer is intact
Robot intact
Freight transfer system intact 
Control module intact
Dual tanks intact
Water heaters intact


*Megasonics - have not been used in a while, they typically have to be replaced anyway so this shouldn't be an issue. 

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