ONTRAK SYNERGY INTEGRA
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Wafer ScrubberOverview
The Synergy Integra™ System is a solution provided by OnTrak for Chemical Mechanical Planarization (CMP) equipment manufacturers. It integrates the CMP polisher and wafer cleaner onto a single platform, improving factory layouts and increasing productivity. The system eliminates the need to move wet wafers between systems, preventing damage that can occur if polishing slurry dries on the wafer.
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