Description
Wafer Cleaning System with Nanospray CE safety marking certification.Configuration
Electric Supply: 3 Phase , 200 VAC , Full load 10.8 kVA 31.2 A, 50/60 Hz 3 wires + GND/PE SCCR 10 kA Main Breaker 60A Mass: 1660 KG Number of wafer loading ports: Qty 4 Wafer Loader type: 150 mm, open cassette Number of process modules: Qty 4 The modules do not have FFUs on top of them. 3 of the Process Modules are equipped with a Jet Nozzle and DI water 1 of the process modules is equipped with one Jet and one Nanospray nozzle and DI Water The modules do not have Brush arms The Jet Nozzle has qty 4 high pressure pumps installed. The Nanospray pressure is regulated by the house supply. Facilities connections: 1. Air 2. vacuum 3. N2 4. CO2 5. DI water 6. Cooling Water 7. NH4OH (Not currently used) 8. H2O2 (Not currently used) 9. Exhaust 10. Drain 11. Power SupplyOEM Model Description
Wafer size 100mm ~ 200mm Advanced Scrubber Featuring the Same Stability and Reliability as the Highly Regarded SS Series. SS-80EX Spin Scrubber is a Single Wafer Cleaning Equipment for 200 mm Semiconductor Wafers.Documents
No documents
CATEGORY
Wafer Scrubber
Last Verified: 4 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
148408
Wafer Sizes:
6"/150mm
Vintage:
2016
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Similar Listings
View All
SCREEN / DNS / DAINIPPON SCREEN
SS-80EX
CATEGORY
Wafer Scrubber
Last Verified: 4 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
148408
Wafer Sizes:
6"/150mm
Vintage:
2016
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Wafer Cleaning System with Nanospray CE safety marking certification.Configuration
Electric Supply: 3 Phase , 200 VAC , Full load 10.8 kVA 31.2 A, 50/60 Hz 3 wires + GND/PE SCCR 10 kA Main Breaker 60A Mass: 1660 KG Number of wafer loading ports: Qty 4 Wafer Loader type: 150 mm, open cassette Number of process modules: Qty 4 The modules do not have FFUs on top of them. 3 of the Process Modules are equipped with a Jet Nozzle and DI water 1 of the process modules is equipped with one Jet and one Nanospray nozzle and DI Water The modules do not have Brush arms The Jet Nozzle has qty 4 high pressure pumps installed. The Nanospray pressure is regulated by the house supply. Facilities connections: 1. Air 2. vacuum 3. N2 4. CO2 5. DI water 6. Cooling Water 7. NH4OH (Not currently used) 8. H2O2 (Not currently used) 9. Exhaust 10. Drain 11. Power SupplyOEM Model Description
Wafer size 100mm ~ 200mm Advanced Scrubber Featuring the Same Stability and Reliability as the Highly Regarded SS Series. SS-80EX Spin Scrubber is a Single Wafer Cleaning Equipment for 200 mm Semiconductor Wafers.Documents
No documents