The Brooks Automation Jet system is an Equipment Front End Module or EFEM. It is the link between the factory’s Material Transport System and the Process Tool.

BROOKS AUTOMATION

Equipment Front End Module (EFEM) with two load ports.
The EFEM is designed for manual, Automated Guided Vehicles (AGV), or Over Head Transport
(OHT) loading of FOUPs or cassettes that contain wafers waiting to be processed in the
process modules. The wafers are removed from FOUPs or casettes by the atmospheric robot
in the EFEM aligned, and moved by the atmospheric robot to the Vacuum Back End Load
Locks. Inside the EFEM is an enclosed area with an air flow to prevent particles from depositing
on the wafer. Inside this area, referred to as the minienvironment, the atmospheric
robot moves wafers from inside FOUPs and cassettes. The Vision Load Port Module
attaches to the front openings or bays. The Razor™ Atmospheric Transfer Robot (ATR) moves the wafers between the Load
Port Modules, Aligner, and Load Ports. The robot provides up to five axes of motion
allowing off-center material pick and place and fast material swap. The end effectors
available offer passive support, an active edge-grip, or a vacuum grip for high operating
speeds.

2412510007intf.pdf

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