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BROOKS AUTOMATION JET
    Description
    Equipment Front End Module (EFEM) with two load ports. The EFEM is designed for manual, Automated Guided Vehicles (AGV), or Over Head Transport (OHT) loading of FOUPs or cassettes that contain wafers waiting to be processed in the process modules. The wafers are removed from FOUPs or casettes by the atmospheric robot in the EFEM aligned, and moved by the atmospheric robot to the Vacuum Back End Load Locks. Inside the EFEM is an enclosed area with an air flow to prevent particles from depositing on the wafer. Inside this area, referred to as the minienvironment, the atmospheric robot moves wafers from inside FOUPs and cassettes. The Vision Load Port Module attaches to the front openings or bays. The Razor™ Atmospheric Transfer Robot (ATR) moves the wafers between the Load Port Modules, Aligner, and Load Ports. The robot provides up to five axes of motion allowing off-center material pick and place and fast material swap. The end effectors available offer passive support, an active edge-grip, or a vacuum grip for high operating speeds.
    Configuration
    Brooks Gemini II (included) -2 Vision load port modules, -Razor ATR Atmospheric Robot and Fusion Controller, -Aligner
    OEM Model Description
    The Brooks Automation Jet system is an Equipment Front End Module or EFEM. It is the link between the factory’s Material Transport System and the Process Tool.
    Documents

    BROOKS AUTOMATION

    JET

    verified-listing-icon

    Verified

    CATEGORY
    Wafer Handling

    Last Verified: Over 60 days ago

    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    81687


    Wafer Sizes:

    12"/300mm


    Vintage:

    2015


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Similar Listings
    View All
    BROOKS AUTOMATION JET

    BROOKS AUTOMATION

    JET

    Wafer Handling
    Vintage: 2015Condition: Used
    Last VerifiedOver 60 days ago

    BROOKS AUTOMATION

    JET

    verified-listing-icon
    Verified
    CATEGORY
    Wafer Handling
    Last Verified: Over 60 days ago
    listing-photo-16bdee8e54004686b0de61897b8085da-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/74469/16bdee8e54004686b0de61897b8085da/ba902619dc7a4f6e83a4123ab2342a80_picture2_mw.png
    listing-photo-16bdee8e54004686b0de61897b8085da-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/74469/16bdee8e54004686b0de61897b8085da/81899f55aeaf45229d67d6a5d6539687_picture1_mw.png
    listing-photo-16bdee8e54004686b0de61897b8085da-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/74469/16bdee8e54004686b0de61897b8085da/f78c88e6c66843c7a862fa77af7a7028_7dcf1caf27a94592bf396aeec885098145005c_mw.jpeg
    listing-photo-16bdee8e54004686b0de61897b8085da-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/74469/16bdee8e54004686b0de61897b8085da/b04abd935e1143c491833eeaa0b9289c_07c1616a44cd48328741290b886e45ad_mw.jpeg
    listing-photo-16bdee8e54004686b0de61897b8085da-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/74469/16bdee8e54004686b0de61897b8085da/fa5d03b6c531483483c3d589284d8ce4_d9fb5e7074be460e879241a2bdcacf41_mw.jpeg
    listing-photo-16bdee8e54004686b0de61897b8085da-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/74469/16bdee8e54004686b0de61897b8085da/c69aeed264c8499394c238db78877681_72384d1c434c4a56a691a3cf919ecd44_mw.jpeg
    listing-photo-16bdee8e54004686b0de61897b8085da-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/74469/16bdee8e54004686b0de61897b8085da/a0743e080550493b821162a1f92e1035_7c298f7221004970bc84708e535c25f9_mw.jpeg
    listing-photo-16bdee8e54004686b0de61897b8085da-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/74469/16bdee8e54004686b0de61897b8085da/7ceb2bf22f174629870ec4d6b0baeba1_20144197bc5346e2ba1671334022c4451201a_mw.jpeg
    listing-photo-16bdee8e54004686b0de61897b8085da-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/74469/16bdee8e54004686b0de61897b8085da/5c77cd1e49da4657b48b823269eb8c95_79b4d1a283434e779cace51fbcd00972_mw.jpeg
    listing-photo-16bdee8e54004686b0de61897b8085da-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/74469/16bdee8e54004686b0de61897b8085da/5f60806a9e504c589b1b675ee4105ee5_eeab3e1bdee7452c9dee8582a0ce559e_mw.png
    listing-photo-16bdee8e54004686b0de61897b8085da-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/74469/16bdee8e54004686b0de61897b8085da/6718acd3d95148cab0ec102d5011cca5_e1809d06cf524bafa263fb237faa321b1201a_mw.jpeg
    listing-photo-16bdee8e54004686b0de61897b8085da-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/74469/16bdee8e54004686b0de61897b8085da/c9b1791a7dd34727a83fc755a843b9fb_e883ced8957b4306b639a95212572f941201a_mw.jpeg
    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    81687


    Wafer Sizes:

    12"/300mm


    Vintage:

    2015


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    Equipment Front End Module (EFEM) with two load ports. The EFEM is designed for manual, Automated Guided Vehicles (AGV), or Over Head Transport (OHT) loading of FOUPs or cassettes that contain wafers waiting to be processed in the process modules. The wafers are removed from FOUPs or casettes by the atmospheric robot in the EFEM aligned, and moved by the atmospheric robot to the Vacuum Back End Load Locks. Inside the EFEM is an enclosed area with an air flow to prevent particles from depositing on the wafer. Inside this area, referred to as the minienvironment, the atmospheric robot moves wafers from inside FOUPs and cassettes. The Vision Load Port Module attaches to the front openings or bays. The Razor™ Atmospheric Transfer Robot (ATR) moves the wafers between the Load Port Modules, Aligner, and Load Ports. The robot provides up to five axes of motion allowing off-center material pick and place and fast material swap. The end effectors available offer passive support, an active edge-grip, or a vacuum grip for high operating speeds.
    Configuration
    Brooks Gemini II (included) -2 Vision load port modules, -Razor ATR Atmospheric Robot and Fusion Controller, -Aligner
    OEM Model Description
    The Brooks Automation Jet system is an Equipment Front End Module or EFEM. It is the link between the factory’s Material Transport System and the Process Tool.
    Documents
    Similar Listings
    View All
    BROOKS AUTOMATION JET

    BROOKS AUTOMATION

    JET

    Wafer HandlingVintage: 2015Condition: UsedLast Verified:Over 60 days ago
    BROOKS AUTOMATION JET

    BROOKS AUTOMATION

    JET

    Wafer HandlingVintage: 0Condition: UsedLast Verified:Over 60 days ago
    BROOKS AUTOMATION JET

    BROOKS AUTOMATION

    JET

    Wafer HandlingVintage: 0Condition: UsedLast Verified:Over 60 days ago